Surface topography imaging (including statistical quantification) and surface chemical species mapping in both 2D and 3D.
White light interferometry
White light interferometry (WLI) is a noncontact 3D surface profiling technique utilising white light. It is conducted using a microscope, a white light source and a stage. The difference with the microscope used is that the incident light is diverted from the test surface and half of the incident light is sent to a mirror flat reference plane inside the microscope, and so the incident beam goes to two places before the reflected beams are re-combined to generate an interference pattern. Z-values for every pixel are generated from the difference in distance between the two beams.
The types of data that can be generated include a ‘Pseudo-colour height map’ which is a 2D representation of a 3D surface in which the third dimension determines the colour of every pixel.